| 摘要 |
PURPOSE:To allow the reduction of the space for containing arms without obstructing arm carriage strokes by a method wherein arms provided in multi- stages and for slide can be extended out and drawn back by utilizing the rope winding power utilizing a drum. CONSTITUTION:After holding a wafer by a mechanical chuck 11, the drum 20 is rotated clockwise by a drive motor 19. Then, a rope 21a is wound up around drum 20 via sheeves 13a-13d, and, on the other hand, a rope 21b is drawn out by turns wherewith the rope 21a is wound up around the drum 20 via sheeves 13e-13h. Arms 12a-12c having contained in the approximate unifomity in up- down directions in a containing case settled in a sub vacuum chamber are extended out in the direction of the arrow A in the order of the arm 12a, lower arm 12b and lowest arm 12c by the winding power generated thereat. As the result, the wafer held by the mchanical chuck 11 is carried from the sub vacuum chamber to a vacuum chamber and mounted at the fixed position of an electrode plate. |
