发明名称 |
Apparatus for examining a sample |
摘要 |
An apparatus for examining a sample by bombarding the sample with primary ions and analysing the secondary ions given off with the aid of a mass spectrometer is equipped with a time-of-flight mass spectrometer (4, 5, 6) known per se and with means for generating either a pulsed primary ion current or a pulsed secondary ion current. <IMAGE>
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申请公布号 |
DE3144604(A1) |
申请公布日期 |
1983.05.19 |
申请号 |
DE19813144604 |
申请日期 |
1981.11.10 |
申请人 |
LEYBOLD-HERAEUS GMBH |
发明人 |
POLASCHEGG,HANS-DIETRICH,DR.;WECHSUNG,REINER,DR. |
分类号 |
G01N23/225;H01J37/252;H01J49/14;H01J49/40;(IPC1-7):G01N27/62 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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