| 摘要 |
PURPOSE:To obtain a photoconductive member superior in electrical, optical, and photoconductive characteristics and characteristics of environment of the use, by providing an amorphous layer, which consists of the first layer region containing C and the second layer region containing atoms of the third group of the periodic table, on a supporting material. CONSTITUTION:A gaseous raw material for Si supply, a gaseous raw material for introduction of H and/or halogen atoms, a gaseous raw material for introduction of C, and a gaeous raw material for introduction of atoms of the third group of the periodic table in bombs 202-206 are flowed into a reaction chamber 201 through valves 222-226, flow-in valves 212-216, mass flow controllers 207-211, and flow-out valves 217-221. A base cylinder 237 is heated at 50- 400 deg.C by a heating heater 238 and the power of a power source 240 is set to a desired value to cause glow discharge, and the first layer region containing C is formed on the cylider 237, and thereafter, the bomb 206 is closed to stop the supply of the gaseous raw material for introduction of C, and the second layer region containing atoms of the third group of the periodic table is formed. |
