| 摘要 |
PURPOSE:To ensure connection between electrodes and fine metal wirings, and moreover to ensure the formation of recognition patterns when the electrodes are to be formed according to the lift off method by a method wherein the recognition patterns are formed at the corners of the electrodes on the surface of a pellet. CONSTITUTION:The notch type recognition patterns 13 are provided at the corners of the electrode 4 on the pellet. Accordingly connection of the metal wiring at the center parts of the electrodes 4, 5 is ensured, distribution of a current is unified, and the characteristic is stabilized. By this constitution, the recognition patterns 13 can be formed without reducing the effective areas of the electrodes 4, 5. Moreover, when an oxide film 7 and a photo resist 10 are to be formed selectively on a wafer 9, the surface is covered with a metal film 11 leaving the films 7', 10' on the corners n of formation programing regions m, the resists 10, 10' are heated, and the film 11 is torn off applying an adhesive sheet 12 thereon. At this time, because the metal films 11a'' exist on the corner parts, adhesion with the sheet 12 is favorable, the metal film can be peeled off surely, and the recognition patterns 13 can be formed surely. |
