| 摘要 |
PURPOSE:To obtain a film thickness with high quality, by automatically correcting the variation of a film forming speed as the elapse of a film forming treatment time in a film forming apparatus by a correction data or a correction function corresponding to a film forming time as input. CONSTITUTION:A reference film forming speed data Vs imparted by a film forming speed setting device 1 is converted to a reference control signal (a) to an apparatus 3 to be controlled by a control signal generator 2. In the apparatus 3, electric power controlled by the signal (a) is sent to a film forming means 32 from a power source 31 and a film forming material is issued from this means 32 to form a thin film on a base plate 33 to be treated. In the next step, the correction of a variation value as the elapse of a film forming treatment time is carried out by a correction signal generator 4. That is, in the generator 4, a correction data stored in a correction data storing apparatus 5 is read out as the variable of output of a film forming time integrating meter 6 to impart a corrected film forming speed data DELTAv to the generator 2 and the generator 2 imparts the correction signal as a control signal DELTAa corresponding to a film forming time. |
