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发明名称
COATER
摘要
申请公布号
JPS5881463(A)
申请公布日期
1983.05.16
申请号
JP19810180486
申请日期
1981.11.11
申请人
NIPPON DENKI KK
发明人
YAMAMOTO HIROICHI
分类号
B05C11/08;H01L21/027;H01L21/22;H01L21/225;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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