| 摘要 |
PURPOSE:To obtain a solar battery having large conversion efficiency and preventing the increase in the resistance value of the first layer made of oxidized indium by forming the second layer made of oxidized tin without raising a deposition substrate to a high temperature. CONSTITUTION:A bell-jar 11 forming a vacuum tank is evacuated in vacuum by a vacuum pump through an exhaust passage 13 having a butterfly valve 12, and a transparent glass plate is disposed as a deposition substrate 14 therein. Oxygen gas is supplied to an oxygen gas discharge tube 17 provided at the bell- jar 11 to oppose the substrate 14 to the outlet while heating the substrate 14 by a heater 15 to 50-350 deg.C, thereby introducing active oxygen gas containing oxygen ions and active oxygen molecules produced by the discharge to become 10<-3>-10<-5>Torr into the bell-jar 11. An indium evaporation source 18 provided to oppose the substrate 14 is heated to evaporate the metal indium, the first layer made of oxidized indium is formed on the substrate 14, a tin evaporation source 19 is then heated to form the second layer made of oxidized tin on the first layer, and a transparent conductive layer is formed. |
