| 摘要 |
PURPOSE:To increase the ionization efficiency of an ion source by providing a target that holds an ionized material with a number of pin-shaped materials and a neutral particle source and applying high voltage to an electrode that is arranged in close vicinity to the target. CONSTITUTION:Argon ions generated in the argon ion gun 1 are accelerated by an accelerating electrode 2 and are incident in a bombardment chamber 3 that is filled with argon gas. A part of them collide with the argon gas and are deprived of charge and then change into high speed neutrons. An electrostatic deflection board 4 is arranged at the lower part of the bombardment chamber 3 and only the neutrons deprived of the charge are incident target 5 on a plate that is arranged at the lower part of the deflection board 4. The target 5 is mounted on the supports 7 and 8 on a conductive stand 6 and a number of pin- shaped materials with a fine diameter are provided. An electrode 10 with a slit 9 is arranged in close vicinity to the target 5. For example, 3kV voltage is applied to the target 5 from a power supply 11 and for example, -7kV voltage is applied to the electrode 10 from a power supply 12. As a result, an ionization effeciency can be increased. |
