| 摘要 |
PURPOSE:To improve the yield of production for a titled magnetic head, by forming consecutively a magneto-resistance film and the 1st conductor film. CONSTITUTION:A magneto-resistance thin film 2 of ''Permalloy '' and the 1st conductor film 3 of Mo are formed consecutively on a glass substrate 1 by a vacuum vapor-depositing process. Then a photoresist mask 5 is formed to etch selectively only the film 3. Thus a magneto-resistance sensor pattern is obtained. The mask 5 is removed, and the substrate 1 is put into a vacuum vapor-depositing device to sputter and etch the surface of the film 3 with an Ar ion for cleaning. At the same time, the film 3 is used to sputter and etch the film 2. Then the 2nd conductor film 4 of Al are formed consecutively by a vacuum vapor-depositing process. Then a photoresist mask is formed to etch Al and Mo. Thus a conductor pattern is obtained. Such magneto-resistance effect type thin film magnetic head has an extremely reduced variance of characteristics. |
