发明名称 INSPECTION DEVICE FOR ROLYGONAL MIRROR
摘要 PURPOSE:To inspect a polygonal mirror easily and surely by providing a slit type chart plate which is pivoting on the axis perpendicular to the plane of the plate, a light source which irradiates the chart plate and a half mirror which reflects the light from the chart plate. CONSTITUTION:An inspecting device for polygonal mirrors has a slit type chart plate 4, a light source 5, a half mirror 3, a collimator lens 2, a plane mirror member 7 and a scanning means. The plate 4 is pivoting on the axis intersecting orthogonally with the plane of said plate. The light source 5 is for illuminating the plate 4. The mirror 3 is used to reflect the light from the plate 4 toward the lens 2. On such constitution, the component angle and angle of inclination of polygonal mirrors are inspected easily and surely.
申请公布号 JPS5880537(A) 申请公布日期 1983.05.14
申请号 JP19810179485 申请日期 1981.11.09
申请人 RICOH KK 发明人 FUKUDA MITSUHISA
分类号 G01M11/00;G02B26/12 主分类号 G01M11/00
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