| 摘要 |
PURPOSE:To enable the simultaneous growth of a plurality of single crystals having different growth conditions from each other, and to improve the efficiency of the growth of single crystals, by using a plurality of crucibles and pulling rotary shafts, wherein said rotary shafts are linked with each other, and the rotational speeds of the shafts and the temperature of the crucibles are made separately adjustable. CONSTITUTION:The titled device is composed of a plurality of crucibles 11 each having an auxiliary heating means 28 and a thermocouple 16, and a plurality of rotary pulling shafts 12, 12'. Said pulling shafts 12, 12' are composed of a central pulling shaft 12 and a plurality of pulling shafts 12 placed around and linked with said central pulling shaft 12. The rotational motion of the shaft 12 is transmitted to the shaft 12' via the gears 18, 19, and at the same time, the shaft 12' is synchronized with the vertical motion of the shaft 12 by the aid of horizontal stationary plates 20, 21 attached to the shaft 12. The shafts 12, 12' can be pulled up from the crucibles 11 with different rotational speeds by using the gears 18, 19 having proper gear ratio. |
