| 摘要 |
An amorphous, carbonaceous, diamond-like film has an extremely low hydrogen content and stress, below 10<10> dynes/cm<2> is resistant to both acids and alkalis, and adheres tenaciously to many types of substrates including glasses, plastics, metals, and semiconductors. The film is produced by radio frequency plasma decomposition of an alkane and a pair of spaced carbon electrodes. |
