| 摘要 |
PURPOSE:To observe the trun original potential distributor of each conductor positioned under the surface of an insulating film from the surface potential of the insulating film by setting a preset period before an observation period uniformly, applying fixed voltage among the surface of the insulating film and each conductor and applying respective original potential to several conductor. CONSTITUTION:Electrons are irradiated while the conductor section of a sample is left as it is Voo to time t2 from t1, the insulating film within at least an observing region is charged at Vso, original potential Vo is applied to each conductor in the sample at time t2, and the observation period is formed. vs=vo Is formed when Voo is made equal to Vso in the surface potential Vs of the insulating film at that time, and the true original potential distribution of the conductor under the insulating film can be observed in the surface of the insulating film when (t-t2) is larger than a time constant. |
