| 摘要 |
PURPOSE:To obtain the high quality thin film solar battery without any curl due to deposition, by forming an amorphous silicon series optical electromotive force element layer on a flexible, heat resisting substrate wherein a metal foil and a thin resin film are compounded. CONSTITUTION:The amorphous silicon series optical electromotive force element layer 3 is fromed as follows. The substrate 10 is placed on an electrode 9 in advance so that the side of its thin metal film faces upward. In a plasma glow discharge method, the degree of vacuum in a vacuum container 7 is decreased to 1-10X10<-6>Torr once, and a gas such as SiH4 is sent from a valve 11. Then the degree of pressure reduction is alleviated to 10<-2>-5Torr and this state is maintained. A DC voltage or a high frequency voltage of 1- several tens of MHz is applied across an electrode 8 and the electrode 9. Then the inside of the vacuum container 7 is brought to a plasma state. This state is maintained for several tens of minutes. Then the amorphous silicon series optical electromotive element layer 3, whose main body is an amorphous silicon thin film, wherein the film thickness is 0.5-1mum, carrier life is 10<-7> seconds or longer, a local level density is 10<17>/cm<3> or less, and carrier mobility is 10<-3>cm<2>/V.sec or more, is is formed on the substrate 10. |
