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发明名称
EXPOSURE DEVICE
摘要
申请公布号
JPS5878170(A)
申请公布日期
1983.05.11
申请号
JP19810176906
申请日期
1981.11.04
申请人
TOKYO SHIBAURA DENKI KK
发明人
FUKUMAKI TOSHIO
分类号
G03B27/54;G03G15/04
主分类号
G03B27/54
代理机构
代理人
主权项
地址
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