Spin coating apparatus and method.

摘要

During spin coating of a liquid magnetic dispersion onto a rotating annular substrate (12), a stationary air barrier plate (11A) is positioned closely adjacent the substrate after deposition of the dispersion thereon and during the time the excess dispersion is spun off the substrate. The air barrier plate serves to reduce the rate of solvent evaporation from the dispersion so that the dispersion flows more readily during spin-off to produce a thinner resultant magnetic coating (15).