| 摘要 |
PURPOSE:To suppress the swelling of resist in developing and improve resolution, by adding a compd. having specific functional groups to a solvent of cyclized rubber resist. CONSTITUTION:1 or >=2 compds. expressed by the general formulaIare contained by 1-50wt% ratio in a developing soln. for cyclized rubber resist. (In the formula, R denotes hydrogen atoms, 1-4C straight chain hydrocarbon groups or phenyl group, and n denotes a positive number 1 or 2.) |
