| 摘要 |
PURPOSE:To obtain a blade member having a small friction coefficient and a superior wearproofness by forming a layer made of silicon carbide and having a specific thickness on the surface onto which the casing of a blade used for a pump or a compressor slidingly contacts. CONSTITUTION:A blade 3 inserted into the slit 2a on the rotor 2 which revolves in a casing 1 is made of graphite carboneous substance, and the layer 3a made of silicon carbide (SiC) and having a thickness of 0.1mm. or more is formed on the blade surface which makes contact with the inner surface of the casing. The SiC layer is formed through either the CVD method or the CVR method. In the former, the mixed gas containing silicon halogenide and hydrocarbon is reacted on the surface of high temperature carbon in the presence of hydrogen, and in the latter, carbon serving as substarate is reacted with Si gas or SiO gas, and only the surface of the substrate is converted to SiC. |
