| 摘要 |
PURPOSE:To have a control of the processing pressure with much freedom through control of the field implying current, by implying a magnetic field to a magnetic fluid, thereby pressing a film-shaped polisher against the surface to be processed, and thus obtaining a processing pressure. CONSTITUTION:A doughnut-shaped polishing liquid containing groove 12 is excavated in a rotary, circular processing disc 11, where a polisher film 13 made of rubber etc. is pinched fast in this groove with the aid of an inner 14 and an outer 15 ring, and then a magnetic fluid is encapsulated in the groove 12. A core as magnetic pole 33 is installed at an upper electric magnet, and at its bottom a work table 38 is arragned. Further, another core 41 as lower magnetic pole is arranged facing the upper magnetic pole 33 with the processing disc 11 interposed, in which magnetization of the upper and lower magnetic poles 33, 41 at the time of processing will form a magnetic flux between these two cores. The magnetic fluid in this groove 12 will gather at places with intense magnetic field, and the central part of the polisher film 13 passing through the space between the magnetic poles is bulged up toward the work 5. The film 13 is pushed against the surface of the work through the polishing liquid. |
