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发明名称
METHOD OF FORMING OHMIC CONTACT
摘要
申请公布号
JPS5877227(A)
申请公布日期
1983.05.10
申请号
JP19820143557
申请日期
1982.08.20
申请人
INTERN BUSINESS MACHINES CORP
发明人
MOODOHAI HAIPURAMU;MAASHIYARU AIRA NEESAN
分类号
H01L21/28;H01L21/285
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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