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发明名称
METHOD OF PRODUCING PROJECTING MASK HAVING NO SUPPORTING SUBSTRATE
摘要
申请公布号
JPS5875837(A)
申请公布日期
1983.05.07
申请号
JP19820171084
申请日期
1982.10.01
申请人
BEBU TSUENTORUMU FUYUURU FUORUSHIYUNGU UNTO TEHINOROJII MIKUROEREKUTORONITSUKU
发明人
FURANKU SHIYUMITSUTO;HORUSUTO CHIRUROTSUFU
分类号
H01L21/027;G03F7/26;H01J9/14;H01L21/312
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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