发明名称 PHOTORECEPTIVE MEMBER HAVING ULTRATHIN FILM LAMINATE STRUCTURE
摘要 PURPOSE:To facilitate control of band gaps by using a photosensitive layer having a layer region obtained by alternately laminating, in plural times, 2 kinds of ultrathin films different in the proportion of constituent atoms and continuous in the distribution of their concentrations in each interface between each couple of the adjacent ultrathin films. CONSTITUTION:The photoreceptive member has a substrate 300 and the photosensitive layer 301 composed of a nonmonocrystalline material and having a layer region obtained by alternately laminating the 2 kinds of ultrathin films different in the proportion of a constituent atoms and continuous in the distribution of their concentrations in each interface between each couple of the adjacent ultrathin films. Here, the proportion of constituent atoms means xi/SIGMAxi, where each of x, x1, x2,...xi is the number of the constituent atom, and it is possible for xi to be 0. The layer 301 is made of the nonmonocrystalline material, and obtained, for example, by alternately laminating the ultrathin films made of a-Si(H,X) and those made of a-Si(O,C,N)(H,X) in plural times.
申请公布号 JPS632060(A) 申请公布日期 1988.01.07
申请号 JP19860146360 申请日期 1986.06.23
申请人 CANON INC 发明人 ISHIHARA SHUNICHI;SAITO KEISHI;ARAO KOZO
分类号 H01L31/0248;G03G5/08;G03G5/082;H01L31/08 主分类号 H01L31/0248
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