METHOD AND DEVICE FOR PRODUCTION OF OPTICAL WAVEGUIDE FILM OF GLASS

摘要

PURPOSE:To improve the controllability of refractive index value and film thickness and to eliminate crazing by subjecting the raw material gases for glass consisting essentially of halides of Si and contg. halides of Ti as a dopant component to flame hydrolysis reaction, depositing fine particles of glass on a base plate and heating the same to vitrify the same to transparent glass. CONSTITUTION:For example, gaseous Ar is supplied to a vessel 21a contg. SiCl4 and a vessel 21b contg. TiCl2 to generate raw material gases for glass which is supplied to a torch 20 for synthesizing fine particles of glass, whereby said gases are subjected to flame hydrolysis reaction. The formed fineparticles 20b of glass are introduced into the vessel 4 in an electric furnace 3. The inside temp. of the vessel 4 is controlled by the furnace 3 and the fine particles 20b deposit on a substrate 8, thereby forming a core layer. Thereafter the supply of the gaseous Ar into the vessel 21b is stopped and a clad layr contg. no TiO2 is formed to form fine glass particle layers 9 in two layered construction. The same is heated in a high temp. furnace, and is vitrified to transparent glass.