| 摘要 |
PURPOSE:To prevent any leakage of a highly reactive liquid metal, and enable the effective ionization of the liquid metal by providing an ion gun, in which field ions are produced from the liquid metal, with a heater which concentrately heats the pointed end of a capillary and the intermediate part of a base part. CONSTITUTION:Since a heater which concentrately heats the pointed end of a capillary 1a and the intermediate part of a base part is installed, a concentrated high-temperature part is formed in the intermediate part of the capillary 1a, and a liquid metal is prevented from leaking down over the outer surface of the capillary 1a due to the concentrated high-temperature part. As a result, any leakage of the liquid metal stored in a reserver 2a is prevented, the liquid metal can be effectively utilized for ino-beam generation, and the amount of the liquid metal charged in an ion gun can be reduced. In addition, by providing a heat- shielding plate 13, heat can be efficiently concentrated on the capillary 1a. Besides, when the temperature of the ion gun is regulate constant by providing a temperature-detecting means, the effect of shielding the leakage of the liquid metal is increased, and a stabilized ion emission can be realized. |
