| 摘要 |
<p>PURPOSE:To obtain a heat-sensitive recording head having a long life and capable of giving excellent-quality printing by providing a substantially non- steped flat protective layer over a resistor layer and a conductor layer provided on the surface of a substrate. CONSTITUTION:On an alumina substrate 1 with a graze layer 2, an undercoat layer 3 and a resistor layer 4 are formed, a wiring conductor layer 6 (Al film of a thickness of about 1mu) is formed through an adhesive layer 5 (Cr film of a thickness of about 1,000Angstrom ) on the layers 3 and 4, and then a resistor protective layer consisting of an oxidation-resistant protective layer 7 (SiO2 film of a thickness of about 3mu) and a wear-resistant protective layer (Ta2O5 film of a thickness of about 4mu) is formed over these layers to manufacture a heat- sensitive recording head. In this case, a step difference between the protective layer part located on the conductor layer 6 and the protective layer part located on the resistor layer 4 is regulated to 5,000Angstrom or less. To implement this, the protective layers are formed by a bias sputtering method in which a bias boltage of 200-1,000V is applied to the substrate.</p> |
