ELECTRONE OPTICAL SYSTEM OF THE ELECTRONE LITHOGRAPH,申请号CS19810007100-传众专利搜索

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发明名称	ELECTRONE OPTICAL SYSTEM OF THE ELECTRONE LITHOGRAPH
摘要
申请公布号	CS221592(B1)	申请公布日期	1983.04.29
申请号	CS19810007100	申请日期	1981.09.28
申请人	DELONG,ARMIN,CS;LENCOVA,BOHUMILA,CS;KOLARIK,VLADIMIR,CS	发明人	DELONG,ARMIN,CS;LENCOVA,BOHUMILA,CS;KOLARIK,VLADIMIR,CS
分类号	H01J37/04;(IPC1-7):H01J37/04	主分类号	H01J37/04
代理机构		代理人
主权项
地址

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