| 摘要 |
In order to give an amorphous, carbon-containing film having diamond-like properties at the same time an extremely low mechanical stress, an extremely low hydrogen content, good adhesive strength, a high resistance to acid and alkali and a hardness similar to that of diamond, the film receives a mechanical stress of less than 10<5> N/cm<2> and has in particular a hydrogen content of at most 1 atom per cent.
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