| 摘要 |
PURPOSE:To make it possible to change the course of a neutral particle beam and make correct aligning of position in a short time required by arranging an ion deflection means between an ion gun and a collision chamber to deflect an ion beam, concerning an ion source suitable for a mass spectrograph. CONSTITUTION:A beam passage route (b) on the exit side of a collision chamber 19 is made to be a smaller hole than (a) so that pressure difference from the inside of an ion source of high vacuum (not exceeding 10<-5>Torr) may be maintained. And Ar ions formed in a formation chamber 6 of an ion gun 1 and accelerated by annular lens electrodes 9, 10, and 11 to be converted into a neutral Ar atom beam after passing through the collision chamber 19. In this example of design, the lens electrode 11 serves as well an X-Y detector as shown in illustration so as to be able to deflect an ion beam 13 into an optional direction and accordingly a course of the neutral Ar atom beam 23b converted by passing through the collision chamber 19 is to be optionally changed. |
