| 摘要 |
PURPOSE:To make it possible to independently regulate the pressure inside of a collision chamber from that of an ion gun through simple constitution by supplying Ar gas while forcing it to leak from the collision chamber, concerning an ion source to be used for a mass spectrograph. CONSTITUTION:A considerable part of ions passing through an inside of a collision chamber collides with Ar atoms to be converted into high speed neutral Ar atoms with almost no change of direction and speed of motion but being deprived of electric charge so that the Ar ions and the neutral Ar atoms are expected to be mixed among the beams passing through said collision chamber. The Ar ions thereof are deflected by a successively disposed deflector 23 and removed while only the neutral Ar atoms pass through said deflector 23 to be taken out as a high speed Ar atom beam 24. Correct regulation of the pressure P2 of the Ar gas for ionization can be performed by changing an opening of a valve 4 independently from the regulation of the Ar pressure P1 inside of the collision chamber by operating the valve 22. |
