| 摘要 |
PURPOSE:To make failure analysis more accurate and highly efficient, by a method wherein quality is inspected by moving an IC to a predetermined position on the basis of the logical circuit diagram data and mounting data. CONSTITUTION:A logical circuit diagram data for an IC 8 to be inspected is read out from a memory 2 by a central processing unit 1 and displayed 4, and a specific area is designated by a cursor. The specified data is read into a controller 1 by the coordinates of the specified data on the display 4 and the page number of the logical circuit data, then the selected circuit is judged. The layout information is read out to the CPU 1 from the memory 3 to obtain the position thereof in a chip, and the drive is controlled 6 so that an XY table 7 coincides with this posision. The IC 8 is made operative by a driving circuit 5 and irradiated by an electron beam 14 to detect 9 a secondary electron 15 corresponding to the quality of the logical circuit under operation. The detected output is given to a monitor 10 as an accurate signal in synchronizm with a deflecting scan of the beam, and displayed. Thus the operating state of the IC is clarified and the failure analysis can be speedily carried out. |
