发明名称 MANUFACTURING DEVICE FOR SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PURPOSE:To effectively perform production management by a method wherein signals from a power source and main equipment such as operating signals are relayed, converted and integrated to display and record the operating condition of the equipment. CONSTITUTION:The operating signal on a switch C connected to the valve 6 of a pump 2, the rotary signal on a motor 7, the operating signal on an electrode 4, and the keying signal on a cover 3 are fed into a repeater 8 and the signals are fetched from the repeater 8 to display and record the operating condition of the equipment on an indicator 9 and a recorder 10. In this way, the operating condition is surely grasped and production management can effectively be performed.
申请公布号 JPS5870521(A) 申请公布日期 1983.04.27
申请号 JP19810127909 申请日期 1981.08.15
申请人 NIPPON DENKI KK 发明人 MORISHITA SEIICHI
分类号 H01L21/02 主分类号 H01L21/02
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