发明名称 SUBSTRATE TRANSFER SYSTEM
摘要 PURPOSE:To prevent the contamination of track by providing strip-shaped grooves along the transfer direction on the upper surface of transfer track and by giving roundness to the corner of groove and the corner of edges. CONSTITUTION:The air injection holes 2 are provided in lines 9a-9f in the transfer direction on the surface of transfer air track 1, a line of air exhaust groove 7 is provided respectively between the lines a-b, b-c, d-e, e-f along the transfer direction, and the corners of the upper edge and bottom are given gradual roundness. Also, at the center region of track between the lines c-d, similar exhaust groove 7 is provided in two lines. The intervals D1, D2 between the air injection hole lines are respectively 20mm. and 40mm., pitch p of the groove 7 is 20mm., width of flat portion between grooves is about 10mm., depth of groove 7 is about 3mm. and is given roundness of about gamma=2-3mm., and the hole 2 is inclined by about 60 degrees to the transfer direction. Since the corner of bottom part and angled portion of upper edge of the exhaust groove are given roundness, it is prevented that contaminant substances are fixed and remained within the air exhausting groove and the inside of groove can also be cleaned easily.
申请公布号 JPS5870548(A) 申请公布日期 1983.04.27
申请号 JP19810169299 申请日期 1981.10.22
申请人 FUJITSU KK 发明人 ARII KATSUYUKI
分类号 B65G51/03;H01L21/677;H01L21/68;(IPC1-7):01L21/68 主分类号 B65G51/03
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