发明名称 APPARATUS FOR INSPECTING NEGATIVES
摘要 Disclosed is an apparatus for inspecting negatives which is provided with a laser beam generating source, a scanner for scanning the laser beam, a holding device for holding a negative having a pattern formed in a reflective area on a first surface of a transparent plate and transferring the negative in a direction perpendicular to the scanning direction of the laser beam, a first converging lens for converging the laser beam on said first surface, a second converging lens for converging on a first photocell the beam transmitted through the negative, a third converging lens for converging on a second photocell the beam reflected by the first surface of the negative, and a comparator for comparing a first signal stream put out from the first photocell and a second signal stream put out from the second photocell and detecting an undesirable adhering matter.
申请公布号 GB8307940(D0) 申请公布日期 1983.04.27
申请号 GB19830007940 申请日期 1983.03.23
申请人 CANON KK 发明人
分类号 G01N21/88;G01N21/94;G01N21/956;G03F1/84;G03F1/86;G03F9/00;G06T1/00;H01L21/027;H01L21/30;H01L21/66 主分类号 G01N21/88
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