SILICON THIN FILM MANUFACTURE AND DEVICE,申请号JP19820170783-传众专利搜索

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发明名称	SILICON THIN FILM MANUFACTURE AND DEVICE
摘要
申请公布号	JPS5869714(A)	申请公布日期	1983.04.26
申请号	JP19820170783	申请日期	1982.09.29
申请人	SIEMENS SCHUCKERTWERKE AG	发明人	NORUBERUTO SHINKU
分类号	C23C16/24;C30B25/02;C30B25/18	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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