发明名称 Method of making double level polysilicon series transistor devices
摘要 A plurality of MOS transistors are formed as an integrated semiconductor device, adjacent transistors sharing a common source/drain region which is created by the edges of inverted regions beneath the gates of the transistors. These gates are first and second level polysilicon, with the second partly overlapping the first. On the opposite ends, the source and drain regions are formed by diffusion using the oxide under the first and second level poly as the diffusion mask.
申请公布号 US4380863(A) 申请公布日期 1983.04.26
申请号 US19820342953 申请日期 1982.01.26
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 RAO, G. R. MOHAN
分类号 H01L21/28;H01L27/088;H01L29/78;(IPC1-7):H01L21/22 主分类号 H01L21/28
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