| 摘要 |
PURPOSE:To maintain the physical properties of tempered glass by forming a reflection preventing film composed of SiO2 as the 1st film material, Al2O3 as the 2nd film material, TiO2 as the 3rd film material and an SiO2 film at the air side on the tempered glass substrate so as to reduce the internal stress of the whole reflection preventing film. CONSTITUTION:An SiO2 film 5 as the 1st film showing compressive stress as the internal stress of the film itself is vapor-deposited on a tempered glass substrate 6 having residual stress. An Al2O3 film 4 or a CeO2 film as the 2nd film having small internal stress is laid on the film 5, and a ZrO2 film 3 and a TiO2 film 2 as the 3rd films each showing tensile stress as the internal stress of the film itself are laid on the film 4. An SiO2 film 1 as the final layer at the air side is then laid on the film 2 to form a reflection preventing multilayer film. The spectral characteristics (reflectance) are improved, and the physical properties of the tempered glass coated with the reflection preventing film can be maintained effectively by the internal stress of the whole reflection preventing film. |
