| 摘要 |
PURPOSE:To enable to perform an easy detection of the presence and a place of a defect on a surface, by a method wherein infrared light by reflected light or transmitted light from a surface to be inspected of a photosensitive film is collected by a detecting part via a detecting lens. CONSTITUTION:In a tester, an infrared transmitting filter is used as a filter 2, and arrayed solid photographing element consisting of, for example, CCD, photo diode element, which are aligned rectilinearly, are used as a detecting part 12. A video signal, proportioning a light volume from the photographing elements, is fetched from the detecting part 12, and a defect is detected using a detecting circuit to display it in a display mechanism. The alignment in parallel of a number of the elements permits the accurate finding of a place of a defect on a film surface and enables the easy detection of the presence and the place of the defect on the surface. |
