| 摘要 |
PURPOSE:To obtain a plurality of data from one light beam to be measured, by the constitution wherein transparent electrodes and transparent light receiving elements are formed on a transparent substrate, and a received light signals from the light receiving elements are taken out through the transparent electrodes. CONSTITUTION:The transparent sensor 10 comprises two transparent sensors 10a and 10b. The electrodes 12 are formed on the transparent glass substrate 11 of the transparent sensor 10a by aluminum evaporation. The light receiving elements 13 comprising a-Si solar batteries are evaporated threron. A plurality of pairs of the linear aluminum electrodes 12, each pair comprising two pieces of electrodes, are laterally arranged, and a plurality of the light receiving elements 13 are arranged at a specified pitch thereon. This is used as an X axis sensor. A plurality of pairs of the aluminum electrodes 12, each pair comprising two pieces of the electrodes, are longitudinally arranged on the transparent sensor 10b, and a plurality of light receiving elements 13 are arranged at a specified pitch thereon. This is used as a Y axis light receiving sensor. When the light to be measured BI is emitted on the sensor 10, the positions in the direction X and the direction Y are measured by the sensors 10a and 10b, respectively. |
