| 摘要 |
PURPOSE:To obtain a relief structural body of high resolution with less radiation dose and high accuracy by irradiating radiations to a thin film of an alpha-substituted acrylate polymer material then developing the same. CONSTITUTION:A thin film consisting of an alpha-substituted acrylate polymer material is formed on a substrate and after radiations are irradiated to the desired parts thereof, the irradiated parts are dissolved and developed with an alkali developing soln. For example, an alpha-substituted acrylate polymer material such as poly(alpha,alpha-dimethyl benzyl methacry late) poly(alpha-methyl benzyl acytate) or the like is dissolved in a solvent such as toluene and the soln. is coated on a substrate. After the coating is exposed by electron rays, the same is developed with an alcohol soln. of sodium alcoholate, an alcohol soln. of org. basic materials such as pyridine or a soln. of inorg. basic materials such as sodium hydroxide. |
