SECONDARY ION MASS SPECTROMETRY

摘要

PURPOSE:To improve analytical sensitivity and accuracy by synchronizing preselected mass sweep quantity of electricity with the passing energy control quantity of electricity, guiding an ion to a detector in a required energy passing condition, and measuring it. CONSTITUTION:The mass sweep voltage 9 of a quadrupole mass spectrometer control power supply 8 and an energy filter applied voltage 11 are connected to each other with a controller 10 containing an n-channel relay circuit and are controlled. If the mass sweep voltage corresponding to the number of ion masses to be measured and their corresponding energy filter applied voltage are previously input to each channel, when the mass sweep voltage is applied to a quadrupole electrode 6, the energy filter applied voltage 11 is varied simultaneously through the controller 10 and the optimum ion measurement condition is obtained.