| 摘要 |
PURPOSE:To obtain a high intensity X-ray source by radiating an accelerated electron on a target, using a plasma flow generated in a plasma generation tube, actuated by high frequency waves as a probe. CONSTITUTION:A plasma generation tube 2 actuated by microwaves is provided in a container 1. The accelerated electron caused by external discharge or emitted from an accelerated electron induction terminal 4 of an electron beam accelerator is injected into a plasma flow 3 generated in the said plasma generation tube and induced to flow along the plasma flow controlled by the magnet 5 etc. and then is radiated on the target 6 made of polyethylene silicone resin or the like. An X ray 6 is emitted through a window 7 made of polyethylene or Be. Since the target 6 is damaged by the accelerated electron beam radiation it can be wound by means of a pulse motor so as to always expose its port of surface to be cleaned. |
