发明名称 SEMICONDUCTOR MOUNT DEVICE
摘要 PURPOSE:To prevent oxidation of mount material and reduction of mount property, by a method wherein an injection hole is provided on a cover of a semiconductor mount device and opening of the cover is cleaned by non-oxidizing gas. CONSTITUTION:A cover 11 has an air injection hole 11a at upper lateral side of an opening 3, and non-oxidizing N2 in heated state is ejected through the injection hole onto the opening 3. In this constitution, portion of a lead frame 10 at the opening 3 is set to produce maximum temperature at the mounting process, stretching of shielding screen of N2 prevents the atmospheric air flowing thereby oxidation of the mount material 6 and temperature decrease of the mount portion of the lead frame 10 are also prevented and the mount property is significantly improved.
申请公布号 JPS5866338(A) 申请公布日期 1983.04.20
申请号 JP19810163423 申请日期 1981.10.15
申请人 TOKYO SHIBAURA DENKI KK 发明人 KAGINO MINORU
分类号 H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/52
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