发明名称 PRODUCTION METHOD OF ION SOURCE TIP
摘要 PURPOSE:To obtain a tip point with a radius of curvature of tens to hundreds Angstrom and to improve the reproducibility of the tip point by adhering a liquid metal to the tip point and by applying an electric field to said tip point to obtain the tip point with a desired radius of curvature then by cooling and solidifying the liquid metal under the electric field. CONSTITUTION:A tip 1 point is dipped in gold Au 3 heated and melted by a heater 2 in a vacuum so as to adhere Au 3 to the tip 1 point. Next, the tip 1 point adhered with Au 3 is heated by a heater 4 in a vacuum, and a high electric field is applied to the tip 1 point by use of an opposed electrode 5 with Au in a melted condition. The heating temperature is at 1,200 deg.C and in case the distance between the opposed electrode 5 and the tip 1 point is 1mm., the applied voltage is 1-20KV. As the applied voltage is gradually increased from a small value, the static electricity force due to the electric field exceeds the contraction force due to the surface tension of melted Au, and melted Au 3 is transformed into a conical shape at the tip 1 point, then the discharge of Au ions from the melted Au 3 surface is started.
申请公布号 JPS5866234(A) 申请公布日期 1983.04.20
申请号 JP19810165072 申请日期 1981.10.16
申请人 FUJITSU KK 发明人 HORIUCHI TAKASHI
分类号 H01J3/04;H01J9/02;H01J27/02 主分类号 H01J3/04
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