| 摘要 |
PURPOSE:To prevent an abnormal discharge and to generate a stable plasma electron beam only from a cathode by using a DC power supply generating a hollow cathode glow discharge instead of using a high frequency power supply as a cathode pre-heating power supply, i.e., a starting power supply. CONSTITUTION:A starting DC power supply SS is provided between terminals of a cathode CA and an acceleration target TA in parellel with a main power supply MS, and the rated voltage of the DC power supply is set at the voltage generating a hollow cathode glow discharge as mentioned above and the rated current is determined in accordance with the size of the cathode CA. The cooling water is fed into a cooling pathage 6 through a dielectric movable hose 7 for feeding the colling water, and the cooling water having circulated in the cooling pathage 6 is discharged through a movable hose 8 for discharging the cooling water and similar to the movable hose 7. An electrode assembly, i.e., plasma electron beam gun thus constituted is movably inserted in a vacuum housing by a movable support member 10 through a dielectric member 9 made of an inorganic material such as alumina. |
