| 摘要 |
PURPOSE:To exhaust an impure gas in a short time by performing the exhaust of a bulb while an inactive gas is fed into the bulb so that the impure gas in the bulb is extruded and replaced by the inactive gas. CONSTITUTION:The exhaust pipe (a) of a bulb A is pinched by a chuck mechanism 5 and is connected to an exhaust path 1, and the tip section of an insertion pipe 18 is inserted into the bubl A through the exhaust pipe (a) by operating an air cylinder 30. The argon gas fed through an inactive gas feed path 19 is spouted from the tip section of the insertion pipe 18 and fed into the bulb A, then the exhaustion of the bulb A is performed through the exhaust path 1 and the exhaust pipe (a). Thereby, the impure gas in the bulb A is rapidly replaced by the argon gas and the exhaustion of the bulb A can be performed in a short time. |
