| 摘要 |
<p>D-11856 PRODUCTION OF LOW-COST POLYCRYSTALLINE SILICON POWDER A silicon-containing feed gas, such as silane, or a halosilane, is decomposed in the free space zone of a reactor maintained at from about 390-1400.degree.C, preferably at about 800-1000.degree.C, to form a silicon powder and by-product gas. The silicon powder is separated from said gas in a settling chamber with additional silicon powder being recovered by the passage of the by-product gas through dust collection means. By introducing the feed gas turbulently into the free space zone, decomposition at the reactor wall and a silicon wall deposit build-up can be minimized. The feed gas may be introduced into the reactor essentially without dilution or together with hydrogen or an inert carrier gas. Silane is the preferred feed gas, with the feed gas preferably being injected into the free space zone through injector means at the top of the reactor. By preheating the injected feed gas, increased production rates or a reduction in the reactor wall temperature may be acheived. S P E C I F I C A T I O N</p> |
