| 发明名称 |
Vacuum evaporation system for deposition of thin films |
| 摘要 |
A blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film-substrate holder and an evaporation source in such a way that the blower, the dust collector and the process chamber constitute a closed circuit.
|
| 申请公布号 |
US4380211(A) |
申请公布日期 |
1983.04.19 |
| 申请号 |
US19810299188 |
申请日期 |
1981.09.03 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SHINOHARA, KOICHI |
| 分类号 |
C23C14/00;C23C14/24;C23C14/56;G11B5/85;H01F41/20;(IPC1-7):C23C13/10 |
主分类号 |
C23C14/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
