| 摘要 |
PURPOSE:To provide openings, which have small variations in their diameters and high dimensional accuracy, by perforation by parallel installing lateral boards, on which parallel arranged manifolds each provided with a plural number of nozzles are fixed, so that the nozzles face to each other, and spraying etching solution from the nozzles. CONSTITUTION:In a reaction container through which a thin iron plate used as a mask element material is sent, lateral boards 11, one surface of each of which is provided with a plural number of parallel arranged manifolds 12 fixed to the surface, are installed so that the manifolds 12 of the boards 11 face to each other. Each manifold 12 is provided with a plural number of nozzles 14 through which etching solution is sprayed, and fixed to the board 11 so that the exhaust holes of the boards 11 face to each other. The nozzles 14 are fixed so that the etching solution is sprayed perpendicularly upon the surfaces of the iron plate sent between the boards 11. In addition, the boards 11 are driven so that they reciprocate perpendicularly to the moving direction of the plate 15 sent between the boards 11. |
