FORMATION OF SUBSTANCE LAYER BY MOLECULE BEAM,申请号JP19820135812-传众专利搜索

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发明名称	FORMATION OF SUBSTANCE LAYER BY MOLECULE BEAM
摘要
申请公布号	JPS5864131(A)	申请公布日期	1983.04.16
申请号	JP19820135812	申请日期	1982.08.05
申请人	INTERN BUSINESS MACHINES CORP	发明人	JIYON ROORENSU FURIIOUFU;PIITAA DANIERU KAAKUNAA;JIYOOJI DEEBITSUDO PETEITSUTO;JIERII MAKUFUAASUN UTSUDOORU
分类号	B01J19/08;C01G15/00;C01G28/00;C30B23/02;C30B31/20;H01L21/02;H01L21/203	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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