| 摘要 |
PURPOSE:To ensure the accurate coincidence between the upper and lower glass plates although they are spearated from each other, by detecting the positions of these glass plates through plural TV cameras and then shifting one of these two glass plates in accordance with the difference of position between these plates to obtain the coincidence of these glass plates. CONSTITUTION:An upper glass plate 3 is set on a control table 2 and vacuum- adsorbed to an adsorbing hole 9 formed at the tip of an up-down moving shaft 11 to be held there. Then a pressure plate 4 moves down to vacuum-adsorb the plate 3 through an adsorbing port drilled on the lower surface. The plate 4 release the vacuum of the hole 9 and moves up along with the plate 3. Then a lower glass plate 1 is fed, and the shaft 11 moves up to hold the plate 1. The shaft 11 which vacuum-adsorbes the plate 1 through the hole 9 moves down and fixed on a tool plate 12. The matching marks 22 and 23 are detected by TV cameras 17, 18, 20 and 21. The difference of position between the plates 1 and 3 is detected by an image processor 32. Then the tables 6, 8 and 10 are driven via a driver 36 and motors 14-16, and the coincidence is obtained between the glass plates 1 and 3. |
